摘要
采用等离子增强化学气相淀积工艺(PECVD)制备出了Fe_2O_3薄膜。用X射线衍射(XRD)和扫描电子显微镜(SEM)分析了薄膜的结构、表面形貌和粒度。研究了薄膜对乙醇、液化石油气、煤气和氢气的敏感特性。结果表明所研制的薄膜对乙醇有较高灵敏度,其检测下限可达1ppm,而对液化石油气、煤气和氢气不太敏感,具有优良的选择性。
A method to deposit hematite (Fe2O3) thin films by plasma-enhanced chemical vapor deposition (PECVD) is introduced. The structure and particle-size of Fe2O5 thin film are analysed by X-ray diffraction and SEM, respectively. The gas sensitive properties of thin film to LPG, coal gas, hydrogen and ethanol are studied. The results show that films prepared in this way are highly sensitive to ethanol. However, it is not so sensitive to LPG, coal gas or hydrogen. Therefore the film is proved to have high selectivity.
关键词
薄膜
气敏特性
气敏元件
α-三氧化二铁
α-Fe2O3 thin film, Gas sensing properties, Gas sensing element
