摘要
文章讨论了喷涂热解工艺制备的ＳｎＯ＿２薄膜的导电机制，从理论和实验上对其电热特性进行了分析，得到一些有益的结果。
Conductiuity niechamism of thin film SnO_2 produced by spary method has beendisscussed.ts electrothermal characteristics have also been studied from theory and experience,andsome useful results were obtained.EEACC:0510D,0520,8460
出处
《电子器件》
CAS
1995年第2期119-124,共6页
Chinese Journal of Electron Devices
