在工艺实践中运用SUPREM工具

Using SUPREM in Process Practice

半导体集成电路工艺模拟软件ＳＵＰＲＥＭ是一个非常有用的ＣＡＤ工具。本论文主要讨论了如何正确、有效的运用这个工具解决工艺问题。本文概括介绍了ＳＵＰＲＥＭ的能力，重点讨论了在工艺实践中如何处理工艺顺序与模拟顺序的差异，本文还介绍了工艺模拟中的一些技巧。

SUPREM is a verg useful tool for integrated Circuit process.How to use SUPREm to solve process with corrently and effectly are discussed in this paper.It is also intro-duced SUPREM function in simplicity and pointed out how to process the differences between proeess order and simulator order.Finally, the techuique about using SUPREM are discussed.