原子力显微术

Atomic Force Microscopy

本文首先介绍了原子力显微术的基本理论，其次讨论了原子力显微镜的结构原理，主要报导了一台我们研制的使用光学偏转法检测的原子力显微镜及仪器性能，仪器测试的结果表明我们这台原子力显微镜获得到了原子分辨率，最后给出使用这台显微镜的首批实验结果。

This paper,firstly,introduces the basic theory of Atomic Force Microscopy,and then,An Atomic Force Mi-corscope based on the optical lever deflection method we made is mainly reported.The experiment shows thatthe atomic resolution is achieved.In the end, the first result of our microscope is discussed。