双束衍射法、污斑法、污线法厚度测定比较与分析

Comparison and Analysis on Thickness Measured by Two-beam Diffraction Method,Contamination Spot Method and Contamination line Method

对用电子显微镜测量薄膜厚度的三种方法：双束衍射法、污斑法、污线法进行了实验及比较分析。结果表明：污线法操作简单、使用方便、定位准确、测量误差小，是一种较为理想的测厚方法。

The experiments ,comparison and analysis for the three thickness measurement methods :two-beam diffrac-tion method , contamination spot method and contamination line method were carried out. The results showedthat contamination line method is very simple in operation,straightforward in use,exact in pointing the area ofinterest and small thickness errors。 It is an ideal thickness measurement method of acceptable acccuracy,