扩展的Schottky发射高分辨扫描电镜

An Extended Schottky Emission HRSEM

本文从理论上评述了扫描电镜中作为电子源的五种发射制式，对冷场发射，热场发射，Ｓｃｈｏｔｔｋｙ发射和扩展的Ｓｃｈｏｔｔｋｙ发射四种制式，就虚源，能量分散，亮度，噪声等一些重要方面进行了详细的比较，指出了扩展的Ｓｃｈｏｔｔｋｙ发射的优越性。同时给出了我们应用扩展的Ｓｃｈｏｔｔｋｙ发射扫描电镜（ＡＭＲＡＹ１９１０ＦＥ）所获得的一些高分辨形貌像。

Five elevtron emission regimes as electron source of SEM were reviewed.A comparison between CFE,TFE ,SE and ESE regimes with respects of virtual source size,energy spread,brightness and noise has been car-ried out in detail , with emphasis on the superiority of the extended schottky emisson of the ZrO/W emitter tothe otheres. Some high resolution topographical images taken with AMRAY 1910 extended schottky emissionSEM have been given.