用于高纯水制备中外压式毛细管超过滤器

External Pressurizing Capillary Ultrafiltration Module for Ultra-Pure Water Production

本文介绍了外压式毛细管超过滤器的结构、性能，并与内压式毛细管超过滤器进行了对比。外压式毛细管超过滤器完全可以除去７０ 以上的胶体、二氧化硅、细菌和内毒素，是适应ＶＬＳＩ需要的最佳终端设备。

The structure and performance of the external pressurizing capillary ultrafiltration modules are described and compared with internal pressurizing capillary ultrafiltration modules. The colloidal silica ,bacteria and endotoxin with diameter greater than 70 can be removed completely by the external pressurizing capillary UF modules ,which can meet the requirement of VLSI,therefore,they are excellent to by used as a final step in the polishing system.