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氧化锌薄膜材料在SAW元件中的应用 被引量:3

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摘要 本文评述ZnO(氧化锌)薄膜材料在SAW(声波)元件中的应用,主要涉及ZnO薄膜材料的特性,制备技术,在SAW元件中的应用举例,并介绍ZnO薄膜研制和进展以及发展动向。
作者 吴雄
出处 《电子元件》 1995年第2期37-40,共4页 Electronic Component Special Monthly
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  • 1Shinobu F, Chikako S, Toshio K. Effects of Li and Mg doping on microstructure and properties of sol-gel ZnO thin films [J]. J Eur Ceram Soc, 2001, 21: 2109-2112.
  • 2Natsume Y, Sakata H. Zinc oxide films prepared by sol-gel spin-coating [J]. Thin Solid Films, 2000, 372: 30-36.
  • 3Masashi O, hiromitsu K, Toshinobu Y. Sol-gel preparation of ZnO films with extremely preferred orientation along (002) plane from zinc acetate solution [J]. Thin Solid Films, 1997, 306: 78-85.
  • 4Bao D, Gu H, Kuang A. Sol-gel-derived c-axis oriented ZnO films [J]. Thin Solid Films, 1998, 312: 37-39.
  • 5Lee Jin Hong, Ko Kyung Hee, Park Byung Ok. Electrical and optical properties of ZnO transparent conducting films by the sol-gel method [J]. J Cryst Growth, 2003, 247: 119-125.
  • 6MOHAMED G A, MOHAMED E A, EL-FADL A A. Optical properties and surface morphology of Li-doped ZnO thin films deposited on different substrates by DC magnetron sputtering method [J]. Physica B, 2001, 308-310: 949-953.
  • 7POLLEY T A, CARTER W B, POKER D B. Deposition of zinc oxide thin films by combustion CVD [J]. Thin Solid Films, 1999, 357: 132-136.
  • 8JAE H C, HITOSHI T, TOMOJI K. Initial preferred growth in zinc oxide thin films on Si and amorphous substrates by a pulsed laser deposition [J]. J Cryst Growth, 2001, 226: 493-500.
  • 9TAKAHIRO N, TAMAKI S, ATSUSHI A, et al. Electro-optical property of ZnO:X (X=Li, Mg) thin films[J]. J Cryst Growth, 2002, 237-239: 533-537.
  • 10ZHAI J, ZHANG L, YAO X. The dielectric properties and optical propagation loss of c-axis oriented ZnO thin films deposited by sol-gel process [J]. Ceram Int, 2000,26:883-885.

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