摘要
用Ｓｏｌ－Ｇｅｌ方法制备了三种ＳｉＯ２凝胶，并以此制造了多孔ＳｉＯ２厚膜湿度传感器。其电容量－湿度关系呈开关特性，转变点约在８５％ＲＨ。
Three kinds of SiO2 gel have been prepared by sol-gel method and then porous SiO2 thick film humidity sensors are made. Their humidity dependences of capacitance have switching characteristics with transition point about 85%RH.
出处
《电子元件与材料》
CAS
CSCD
1995年第5期19-22,共4页
Electronic Components And Materials
关键词
二氧化硅
湿敏特性
湿度测量
制造
thick film technology
porous SiO2
humidity sensors.
