金刚石薄膜涂层──一种新型固体表面强化方法

Diamond Film Coating──A New Way of Solid Surface Forcing

阐述了金刚石薄膜涂层的性能及应用前景．用微波等离子体化学气相沉积方法在Ｓｉ（１１１）以及ＳＤＡ１００３人造单晶金刚石的外露面上沉积出了优质金刚石薄膜层。

In this pepar the Properties and the application prospects of diamond film coatingwere described. And the excellent diamond film were deposited on Si (111) and SDAl00. manmadediamond with the method of microwave plasma chemical vapor desposition.