微型集成化色谱仪

Integrated Micro-Chromatograph

用微制造技术和色谱原理结合，以全新的概念和设计思维研制色谱仪－微型集成化色谱仪。这种仪器的整个色谱部分在一个基片上制成。集微型进样器、细内径毛细管技和微型固体检测器于一体，功耗不过几瓦、重不过几百克，而分析速度比现有仪器提高近一个数量级，检测灵敏度可达１０－６Ｖ／Ｖ。这种仪器的制作过程类似半导体器件，能大批量、性能高度重复可靠、而成本极为低廉地制造出来，彻底改变传统色谱仪器的生产方式。本文给出这种仪器的基本设计和制作原理，讨论研究重点，并介绍几个应用实例。

An integrated micro gas chromatograph developed by using silicon micro machiningtechnology and the principle of chromatography is introduced.The main GC parts including amicro injector,a narrow bore column and a solid state micro detector are integrated on onewafer.This gas chromatograph of only several hundred grams weight analyzes sample ten timesfaster than conventional GC with a detection limit of 10-6V/V and a few watt in powerconsumption.The manufacture process of this instrument is similar to that of semiconductorchips so that mass production with high reproducibility and very low cost which so completelydifferent from the produedon of conventional GC can be accommplished.The basic design of this instrument and the principle of micro-machining is descrbed,practical applications are given and the key points of the development of thes GC is alsodiscussed.