H-600型电子显微镜抽真空自控电路分析

Analysis of Auto-control Circuit for Evacuation System of Model H-600 Electron Microscope

文章简要介绍了日立H-600型电子显微镜抽真空系统,分析了抽真空程序及其程序控制电路。对于准确、快速排除抽真空自控电路的故障具有一定的帮助作用。

The paper simply introduces the evacuation system for model H-600 electron microscope and analyzes the program of evacuation and the program control circuit. It is helpful for rapid and correct trouble-removing of the evacuation circuit.