XRF法定量分析合金薄膜材料的厚度及组成

Quantitative Analysis of Thickness and Composition of Alloy Thin Films Using XRF Method

本文采用ＸＲＦ分析技术，用Ｃ语言设计运算软件，能无损、快速和精确地同时检测合金薄膜材料的质量厚度及组成含量，并可计算合金膜的体积密度和线性厚度，检测结果的相对误差在３％左右。

The program in C language was developed according to the theory of fundamental parameter (FP) calculation by XRF. It can be used for simultaneous determination of the masslthicknbo'and composition of alloy thin films nondestructively, rapidly and precisely it cd. alsofietied;for calculatign of density and linear thickness of of alloy film. The relative tatibie