湿度测量技术与湿度传感器的发展趋势 ——5^(th)IMCS评析

Trends of developrment of humidity measurement technology and humidity sensors——An evaluation of the 5^(th) IMCS

通过对第五届国际化学传感器会议的分析,作者认为,发展专用湿度传感器,例如高温、高湿环境测湿用的湿度传感器以及检测固体表面凝聚水量、检测微区空间气相湿度的测湿技术和湿度传感器等,乃是当前湿度传感器和测湿技术深入发展的主要标志之一。文章对SAW固体电介质（氧离子导体、氢离子导体）、聚合物电阻型以及微型si空气桥热力学式等四类湿度传感器技术与国际先进水平作了一些比对,并对与国际先进水平的差距及其学术上的原因作了某些分析。

Through the review of the 5th IMCS.the author holds that one of the main recent developments of humidity measurement technology is to develop specialized humidity sensors, such as sensors to be used in high temperature and high humidity environment, sensors for the detection of condensed water on solid surface, and sensors for themeasurement of gas phase humidity in the space of microregions. Four types of humidity sensor——SAW type,solid electrolyte type, polymer-based resistance type and micro silicon air -bridge thermodynamics type are de-scribed. The humidity measarement technology and humidity sensors of China are compared with international ad-vanced level. The reasons for China lagging are discussed academically.