钌铱钛锡钴五元氧化物纳米晶涂层的制备

Preparation of Ru-Ir-Ti-Sn-Co Quinary Oxide Coating with Nanograins

采用热分解法在５００℃氧化烧结获得五元金属氧化物涂层的制备方法，可获得７ｎｍ晶粒的纳米涂层。采用扫描电子显微镜，透射电子显微饶和Ｘ射线衍射技术分析该涂层的表面形貌、内部晶粒形貌和晶体结构特点。

The grain size of coating prepared by conventional thermal decomposition method(TDM) is about 30 nm. Using the new method in this paper to prepare quinary oxide coating, we can obtain a nanograins coating with its grain size of about 7 nm. The surface morphology, internal grain morphology and crystal structure of the coating are studied by scanning electron microscopy, transnission electron microscopy and X-ray difractory techniques.