摘要
本文从微波等离子体发射光谱中,研究不同条件下用微波等离子体辅助化学气相沉积(MPCVD)法沉积金刚石薄膜。讨论了微波功率和沉积压力变化时,分析等离子体中电子的平均能量,研究MPCVD 法沉积金刚石薄膜。
In this article, the deposit of diamond membrane is studied, in different conditisons, with the help of microwave average-ion to the chemical meteorology deposit, and the average energy of the electron in the average-ion and diamond mombrane deposit by MPCVD, are studied and analyzed, when the deposit pressure and the microwave power change.
出处
《阜阳师范学院学报(自然科学版)》
1995年第1期105-107,共3页
Journal of Fuyang Normal University(Natural Science)