光纤型表面粗糙度比较测量仪的研制

The Development of Surface Roughness Comparative Tester Using the Optical Fiber

本文简单论述根据光散射理论研制的表面粗糙度测量光纤传感器的结构特点,介绍了利用这种新型传感器构成的表面粗糙度比较测量仪的结构原理和性能分析。仪器实际测量精度为±20%,重复精度为±5%。

This paper briefly reports the construction character of optical fiber sensor for surface roughness,which based on theory of light scattering. In this paper,the operation principle and technical characteirstics of a new surface roughness comparative tester using the aforementioned optical fiber sensor.The measuring errors of the tester are analysed and some measure res- ults are given.The measuring accuracy of the tester is ±20% and the meas- uring repeatability is better than ±5%.