一个用于俄歇微分析的场发射枪探针系统

A Field-emission Microprobe Forming System for the Scanning Auger Electron Microscope

高分辩俄歇分析要求一次电子束在低的束能下具有足够的束流和尽可能小的束斑。为了这一目的发展了全静电式电子探针系统。该系统是由一个具有加速单透镜的场发射电子枪及一个不对称静电物镜所组成,它可以方便地与CMA 等多数电子能量分析器相配合,并且可以工作在相当低的束能下(<1 keV)而具有良好的光学特性。实验结果表明,当试样工作距离为2.5cm,束能为10keV 时,可以在100(?)的探针直径内获得0.1nA 的束流。

An electronstatic microprobe forming system for the Augermicroanalysis has been developed and releazed.This system consists of a field-emissio n cathode followed by a symmetric accelerating lens and an asymmetricelectrostatic objective lens.The system is compatible with most of analysers andcan work at very low beam energy giving good-optical characteristics.The exe-perimental results showed while 10keV,a probe diameter of 100(?) can be obtained.