苯丁光致抗蚀干膜的改性

Photoresist based on acrylic esters modified styrene-co-maleic ankydride

讨论了用丙烯酸酯改性的成膜树脂组分及各组分的相对比例、溶剂、分子量调节剂、加料方式等对成膜树脂分子量及干膜性能的影响。试验结果表明改性改善了市售苯丁抗蚀干膜的性能。

The effects of the components and monomers ratios of the membrane foming resins,solvents,molecular weight control agents,manners of feeding,etc,on the molecular weight of the resins and the properties of the photoresist films are discussed.The result shows that the performance of the photoresist based on styreneco maleic anhydride was improved.