光热偏转薄膜热导测试系统及其应用

Thermal Conductivity Measurement System for Photothermal Deflection Thin Films and Its Applications

根据光热偏转光谱（ＰＴＤＳ）原理，研制成功光热偏转法薄膜热导测试系统，对大量试样进行了测量，结果同文献参考值符合较好，测量重复精度优于５％，为材料科学有关热性质的研究，特别是有关光热偏转薄膜热导率的研究提供了有力的检测手段，为研制高质量金刚石薄膜提供了依据。

A thermal conductivity measurement system for photothermal deflection thin films was successfullydeveloped according to the priciple of Photothermal Deflection Spactroscopy(PTDS).A large number ofsamples of thin films were measured and the results agreed well with the reference data in the literatures.Itsrepeatation accuracy was better than 5%. It provides a powerful measure for the study of thermalproperties of materials,in particular, for photothermal deflection thin films,and it has been making animportant contribution to the improvement of thermal property in diamond films.