硬质薄膜的超显微硬度表征

CHARACTERIZATION OF HARD COATINGS BY ULTHA MICRO-INDENTATION

本文介绍了一种用于研究材料（尤其是薄膜）塑性和弹性性能的超显微压痕系统。薄膜的硬度和杨氏模量由测试过程中记录下来的所谓加载－卸载曲线推导计算而出。这种系统不仅可以精确探测到极小载荷（～０．１ｍＮ）引起的形变（～１ｎｍ），而且能区分由塑性引起的形变和由弹性引起的形变，从而使得获得的硬度值更准确。另外这种系统在一次加载－卸载过程中即可得到薄膜硬度随深度之分布。本工作采用超显微压痕系统研究了ＴｉＮ，ＴｉＢ＿２，ＤＬＣ以及ＣＮ等硬质薄膜的弹性和塑性行为。最后，本文给出了一个该测量系统在薄膜工程中应用的例子。

An ultra micro-indentation system for investigating plastic and elastic properties of hard coatingsand near-surface materials is described.The microhardness and Young’s modulus of the materialsare derived from records of loading and depth of penetration.The load can be controlled less than0.1mN and depth of penetration is measured with a resolution less than 1nm.The instrument can alsodistinguish plastic and elastic deformation so that the accuracy and precision of the obtained hardnessdata is greatly improved.Determination of the depth distribution of hardness can be carried out inone single indenting process.The plastic and elastic behaviors of TiN, TiB_2, DLC and CN films arestudied in the present work. Finally, one practical application of the system in coating engineering isreported.