针尖轮廓飞象扫描检测方法研究

An Investigations on“Flying”Image Trace Measuring Method for Pin-Point Shape

分析了目前我国几种针尖轮廓检测方法、特点和存在问题。提出了一种针尖飞象自动检验方法，其原理是：被检测的针尖和探测器不动，利用转镜系统扫描针尖，产生针尖各部的时序象（飞象），这些依次出现的象受到探测器检测，即可获得反映针尖轮廓的一串直径信息。文中还对飞象扫描法的误差进行了分析和讨论。

The pinpoint shape measuring method, features and the existing problems are analysed in the paper.An automatic pinpoint shape measuring method is put forward.Its principles are:the measured pin-point detectors are static and the pinpoint is scanned by the rotating mirror system,thus the sequential images(flying images) of various parts of the pinpoint can be produced. These appeared images in turns will be measured by the detector.and a series of diameter data reflecting pin-point shape can be obtained. The errors in flying image scanning method are analysed and discussed in the paper.