摘要
介绍新型自扫描光栅精密位移传感器用的ＣＧ２００型ＳＳＰＡ器件，它是一种专用固体图象传感器。文中叙述了其电路工作原理、结构特点和功能及光学增透膜的作用，给出了器件的主要性能指标。最后，简单介绍了ＣＧ２００构成的自扫描光栅传感器的示意图。实验结果令人满意。
CG200 SSPA device used in novel self-scanning grating precision displacement sensor is presented in the paper.It is a special solid state image sensor.Its circuit principle, structural features and functions and the effects of optical antireflecting film are described in the paper.The main specifications of the device are given. The sketch map of the self-scanning sensor composed of CG200 is briefly presented and the experimental results are satisfactory.
出处
《光电工程》
EI
CAS
CSCD
1995年第3期53-58,共6页
Opto-Electronic Engineering
基金
国家"八.五"重点攻关项目
关键词
光电二极管阵列
位移测量
光栅传感器
Photodiode arrays. Displacement measurement, Grating sensors,Solid image sensors,Displacement sensors.
