硅微声光传感特性的实验研究

The Experimental Investigations on Acousto-Optic Sensing Characteristics of Silicon Microvibrator

硅微声光传感器是一种由硅微列阵簧片和光纤组合成的新型传感器，这种传感器在完成声光转换的同时对声频信号进行了并行滤波处理，可用作神经网络的并行输入，是一种光机电一体化的传感系统。本文中叙述通过光纤反射强度调制技术检测硅簧片振动信号的方法；通过实验研究，完成了对声光调制信号的探测和预处理，并给出了实测数据及其分析。为实现音频编码和振动信号的实时分析，本文中还给出了采用人工神经网络对阵列传感器的输出信号进行并行处理的仿真实验结果。

The acousto-optic sensor is a new type of sensor which is composed of silicon microvibrator array and optic fiber.When the acousto-optic conversion is carrying out.at the same time the parallel filtering for the acoustic signal is carried out by the sensor.It can be used as parallel input of neural network.and it is a sensing system composed of optical,mechanical and electronic units.The testing method for silicon microvibrator by optic fiber reflecting inteisity modulation is described in the paper.The detection and preprocessing for the acousto-optic modulated signal have been finished by the experimental investigations.The practical tested data and the analysis are given.In order to realize acoustic encoding and the real time analysis of the vibrating signal,the parallel processing and the simulation results fot the output signal of the sensor array through neural network are given in the paper.