微米亚微米矩形光栅衍射特性的实验研究

Experimental Research on Diffractive Performance of the Rectangular Gratings with Micron or Submicron Period

本文应用微电子制板技术、电子束扫描曝光和离子刻蚀技术研制成功微米、亚微米级宽度的矩形光栅结构，并对其进行了衍射特性的研究。实验测试数据表明了当光栅的周期接近使用的照明光的波长时，具有明显的矢量衍射特性。

In this paper, some rectangular gratings with micron or submicron period were fabricated by means of electron lithography and ion etching techniques, and with these gratings their diffractive performances were experimentally measured. The measured data show that, as the period of grating is comparable to the incident wavelength, the diffractive angular spectra exhibit the electromagnetic vector's feature.