单体流量对苯乙烯等离子体聚合过程影响的光谱分析

SPECTROSCOPIC ANALYSIS OF FLOW RATE EFFECT ON PLASMA POLYMERIZATION OF STYRENE

单体流量是影响等离子体聚合沉积过程的重要宏观参数之一。本文应用发射光谱方法研究了苯乙烯单体流量变化时，ＣＨ，Ｃ４Ｈ粒子发射强度的变化情况，用红外吸收光谱法分析了等离子体聚苯乙烯膜的本体结构，并测量了相应放电条件下膜的沉积速率。结果表明，流量变化影响了等离子体内部碰撞过程及活性粒子的驻留时间，从而对聚合物沉积膜的结构和沉积速率产生影响。

Monomer flow rate has been referred as a key parameter in the preparation of plasma polymer films. The present work studied the effect of styrene monomer flow rate on the emission intensities of CH ,C4H species, the polymeric structure and the deposition rate of plasma-polymerized styrene thin films. The proposed analysis showed that the collision processes in the plasmas and the reidence time of reactive species produced thereof in discharge volume change at different flow rates,which was responsiible for the change in the deposition rate and the concentration of phenyl groups in the deposited films.