摘要
用光学多道分析仪(OMA-3)考察了表面波型微波感耦氖等离子体(Ne-MIP)的发射光谱。经过Abel反演后,得到了在各种气压和微波功率下Ne-MIP光谱辐射光强和激发温度的空间分布及其变化规律。讨论了等离子体的激发机理,推算了亚稳态原子的空间分布情况。
Emission spectra of a low-pressure neon microwave-induced plasma sustained by a surfatron were studied using OMA-3. After Abel inversion, the spatial distributions of sion spectral intensities and excitation temperatures of the plasma were given at different neon pressures and microwave powers. The excitation mechanism of the plasma and experimental results were discussed.
出处
《光谱学与光谱分析》
SCIE
EI
CAS
CSCD
北大核心
1995年第2期35-40,共6页
Spectroscopy and Spectral Analysis
基金
云南省科委应用基础研究基金
关键词
MIP
辐射光谱
空间分布
激发机理
氖
Ne-MIP, Emission spectra, Excitation temperature, Neon metastable,Spatial distribution