表面波型微波感耦氖等离子体空间分辨光谱诊断

SPATIALLY RESOLVED SPECTROSCOPIC DIAGNOSTICS OF NEON MICROWAVE-INDUCED PLASMA

用光学多道分析仪（ＯＭＡ－３）考察了表面波型微波感耦氖等离子体（Ｎｅ－ＭＩＰ）的发射光谱。经过Ａｂｅｌ反演后，得到了在各种气压和微波功率下Ｎｅ－ＭＩＰ光谱辐射光强和激发温度的空间分布及其变化规律。讨论了等离子体的激发机理，推算了亚稳态原子的空间分布情况。

Emission spectra of a low-pressure neon microwave-induced plasma sustained by a surfatron were studied using OMA-3. After Abel inversion, the spatial distributions of sion spectral intensities and excitation temperatures of the plasma were given at different neon pressures and microwave powers. The excitation mechanism of the plasma and experimental results were discussed.