扫描镜的研制工艺与检测

Manufacturing technology and testing of scanning mirror

用于卫星探测等仪器中的扫描镜，形状一般为三面或四面镜，技术要求很高，因此，加工工具和方法也需要相应的改进。粗加工时主要控制面与面的角度和对称尺寸；精抛时即要注意面形，又要控制面与面的角度与塔差。加工过程中检查面形主要用平面干涉仪，检查面间夹角和塔差使用两个光轴互相垂直的平面仪，加工结果，四反射面扫描镜最佳面间夹角误差优于１″，塔差和平行度以及面形均达到技术要求。

In some instruments for satellite survey, the scanning mirror usually have three or four reflective surfaces,of which technical specifications are very high.In manufacturing,tools and methods need improving correspondently. In rough grinding.mainly the angle between two surfaces and sym-metrical sizes are controlled,while in fine grinding and polishing,surface figure,as well as the angle between two surfaces and pyramidal error,is controlled.The surface figure is tested mainly by a planar interferometer.The angle between two surfaces and pyramidal error are lested by a planometer having two perpendicular optical axes.As a result of manufacturing. the best accuracy of angle between two surfaces of the canning mirror with four reflective surfaces is better than one second arc and the pyra-midal error Darallclism also reach the technical requirements.