摘要
报道用束传播法（ＰｒｏｐａｇａｔｉｎｇＢｅａｍＭｅｔｈｏｄ）模拟设计、指导硅大断面单模脊形光波导的制备工艺。应用傅里叶交换法计算了硅光波导中导模的传播常数。对实际研制成功的ＳＩＭＯＸ及Ｓｉ／ＧｅｘＳｉ１－ｘ／Ｓｉ单模脊形光波导，比较了其性能差异并给予理论解释。
This paper reports the use of propagsting beam method (BPM) to simulate and design the large cross-section single mode rib waveguides. The Fourier transformation is used to calculate the propagating constants of the Si waveguides. For the practical SIMOX and Si/GexSi1-x/ Si single- mode rib waveguides, Comparison of the performance differences and theoritical explanation have been given.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1995年第3期337-341,共5页
Acta Optica Sinica
关键词
硅
光波导
束传播法
设计
制备
Si optical waveguides
propagating beam method.
