一体型平行弹簧扫描隧道显微镜

Scanning Tunneling Microscope Using a Momolithic Parallel Spring

描述了一种新结构形式的扫描隧道显微镜（ＳＴＭ）系统。该系统使用一体型平行弹簧和压电致动元件（ＰＺＴ）作为精密二维位置控制器件，使得ｘ轴和ｙ轴间的位移干扰变得极其微小。控制ｚ轴位移及试件与探针间距的压电致动元件是以悬挂方式固定在一体型平行弹簧上的，因此，对ｚ轴的位移干扰亦可忽略。

This paper describes a novel scanning tunnling microscope (STM) system usinga two-dimensional monolithic Paranel spring (MPS) and piczo-electric actuators (PZT)for precision two-dimensional positioning. This leads the interference between the x-axisdisplacement and the y-axis to be very small. The PZT used for controlling the z-axisdisplacement and the sample-to-tip distance is mounted on the monolithic parallel spring.Therefore, the mutual interference to z-axis displacements is negligible.