软X射线聚焦波带片制备工艺的研究

Fabrication of Soft X-Ray Condenser Zone Plates

利用全息光刻和离子束刻蚀技术制作了用于软Ｘ射线聚焦和色散的三种参数的高精度菲涅耳（Ｆｒｅｓｎｅｌ）波带片，给出了实验结果。

oft x-ray condenser zone plates with three kinds of parameters are fabricated by holograph-ion beam etching technique. Zone plate condensers are used in our soft xray microscopy experiments which act in combination with a pinhole as a linear monochromator.