摘要
提出一种实时偏振相移干涉技术,该方法具有光路简单,不需防震、可明室操作、易于实现相移、便于计算机自动分析条纹,从而实现实时高精度自动化测量等优点。文中对该方法给出了严格的理论推导和实验验证。
ased on the principle of projected grating, a new real-time polarization phaseshift shearing interferometry is proposed and discussed. The method can be used for measuring shapes of 3-D diffuse objects and displacement of large deformation automatically. Some experiments were demonstrated to verify the validaty of the present technique.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1995年第8期1127-1130,共4页
Acta Optica Sinica
关键词
偏振相移
剪切
干涉计量术
real-time, polarization phase-shifting, shearing interferometry