摘要
研究了(Ti,Al)N薄膜的光学特性,对其反射和透射光谱作了仔细分析。运用Hadley方程,算出了一定成分(Ti,Al)N膜的折射率n,消光系数k随波长的变化关系。又根据透射曲线,计算出了(Ti,Al)N膜的光隙能。
The optical properties of (Ti, Al)N thin film have been studied and the transmission and reflection spectra have been analysed carefully. Using Hadley equations, the optical constants, n-refractive index, k-extinction coefficient of (Ti, Al)N films were determined. According to the transmission spectrum of (Ti, Al)N film, the optical gap energy of (Ti, Al)N film was calculated.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1995年第10期1467-1470,共4页
Acta Optica Sinica
关键词
薄膜
透射和反射光谱
复折射率
氮薄膜
Ti, Al) N thin films, transmission and reflection spectra, complex refractive index.