（Ti，Al）N薄膜光学性能的研究

Study on OPtical Propertics of (Ti, Al)N Films

研究了（Ｔｉ，Ａｌ）Ｎ薄膜的光学特性，对其反射和透射光谱作了仔细分析。运用Ｈａｄｌｅｙ方程，算出了一定成分（Ｔｉ，Ａｌ）Ｎ膜的折射率ｎ，消光系数ｋ随波长的变化关系。又根据透射曲线，计算出了（Ｔｉ，Ａｌ）Ｎ膜的光隙能。

The optical properties of (Ti, Al)N thin film have been studied and the transmission and reflection spectra have been analysed carefully. Using Hadley equations, the optical constants, n-refractive index, k-extinction coefficient of (Ti, Al)N films were determined. According to the transmission spectrum of (Ti, Al)N film, the optical gap energy of (Ti, Al)N film was calculated.