干涉法测量压电材料的复压电常数

Interferometric Method of Measuring Complex Piezoelectric Constants of Piezoelectric Materials

介绍了采用迈克尔逊干涉仪测量压电材料复压电常数的新方法。干涉仪中一个平面反射镜与被测试样粘为一体，另一个与控制压电陶瓷粘为一体。利用光电二极管和两相锁相放大器对干涉图像进行转换和放大测量。被测试样长度形变的检测分辨率可达０．６ｐｍ。文章给出了对ＰＺＴ系列ＰＸＥ５型压电陶瓷ｄ＇３１、ｄ″３１与温度、频率关系的测量结果，温度范围为－６０～９０℃，频率范围为２．５Ｈｚ～２．５ｋＨｚ。

In this paper, a new method of measuring complex piezoelectric constants ofpiezoelectric materials with Michelson interfermeter is presented.The interferometerconsists of two mirrors, one is allached to the sample and the other to the controlledpiezoelectric ceramic, By using photodiode and two phase .lock- in amplifier, theinterference figure is transfered, amplified and measured. A change of sample length dueto converse piezoelectric effect as small as 0. 6 pm is detected. In the range of frequenceo f 2. 5 Hz￣2. 5 kHz and temperature of -60￣90℃, the d,, d, of PXE5 piezoelectricceramic of PZT series are measured and discussed.