用半导体激光器实现高精度动态定位

Research on High Accuracy Dynamic Positioning Using Diode Lasers

提出了一种新的半导体激光定位技术。把半导体激光器的线性调频特性和双波长细分技术结合起来，用两个半导体激光器完成了零点的高精度动态定位，突破了传统白光定位的局限，简化了干涉仪的设计，实现了大范围的零点捕捉。定位精度达到０．０１μｍ。

A new zero optical path difference (OPD) point positioning technique using diode lasers is proposed in this poper. With the linear frequency modeulation property of a diode laser and the technique of dual-wavelength refinemenr, the zero OPD point of a interferometer is dynamically searched with a very high accuracy of 0. 01 micrometer. Compared to that of the traditional white light positioning, the interferometer of diode laser positioning is simplified, and the searching range of the zero OPD point has been increased greatly.