摘要
实验探讨和研究了精密可控工作台的位移测量系统，计算机控制系统和微位移系统。实现了传统光学到尺数字化，使具有0．5mm刻度值的标准刻尺达到了1μm的分辨率和2μm的测量精度，并成功地用于精密可控工作台的位移实时测量，具有一定的实用价值。
In this paper the displacement measuring system,computer control system and microdisplacement system are researched. One micrometer resolution and 2 micrometers measuring standard scale were achieved. The real time displacement measuring of precision controllable worktable was also successfully completed.
出处
《光学仪器》
1995年第6期5-10,共6页
Optical Instruments
