一种光学非球面检测技术中的数据处理问题

A DATA-PKOCESSING PROBLEM IN THE MEASURING TECHNIQUE OF OPTICAL ASPHERICAL SURFACE

本文介绍一种激光束平移转动法检测光学非球面，较好地克服了以往各种检测方法的局限性。文中着重介绍该方法的数学模型、精度分析、非球面参数拟合及面形质量评价等数据处理问题。以计算实例说明激光束平移转动法检测非球面具有通用性强、精度高、测量周期短等特点。

In the paper,a laser-beam-shifting-revoluting method was introduced for the measurementof optical aspherical surface,and it fairly well overcame the limitation that all kinds of similarmethods used inthe past;The paper chiefly introduced such data process problems as the relatedmathematical model,the precision analysis,the fit of aspherical surface’s parameters and theevaluation to the quality.Such features as the powerful generality,the high precision,and the shortmeasuring cycle were described by the examples calculated.