摘要
本文研究了热丝ＣＶＤ方法生长金刚石薄膜过程中，衬底表面的损伤处理对金刚石薄膜光学性能的影响，以及膜中非本征杂质吸收对其红外光学特性的影响。
We have studied that,in this paper,the effects of the handpolished surface of the substrateson structure of deposition films,in diamond thin films growth by HFCVD,and effects of non-intrinsicabsorption by impurities of deposition films on infrared optics transmittance of deposition films.
出处
《光子学报》
EI
CAS
CSCD
1995年第2期175-178,共4页
Acta Photonica Sinica
