用于超精微观形貌检测的STM研制

The Developement of STM Used for Ultra-Precision Microtopography Detection

研制了一种具有原子级和纳米级分辨率的宽范围扫描隧道显微镜（ＳＴＭ），通过理论分析和实验论证，介绍纳米级精度微进给机构的原理及特点，研究了一种适于该仪器的简易、有效的隔振系统及探针夹持方法，并对夹持精度进行分析，实验结果表明该仪器可用于原子级与纳米级精度微观形貌的检测．

A long-rang scanning tunneling microscope(STM)with atomic and nm grade resolution is developed.Through theoretical analyses and experiment vertification,the principle and feature of a micro-feed mechanism are introduced.A simple and efficient vibration isolating system used for this instrument is studied.Furthermore,a simple and reliable tip holding method and its holding accuracy are also introduced.The experiment results indicated that this instrument can be used for detecting the microtopography with atomic and urn accuracy.