蒸散型吸气剂的出现电势谱研究

A STUDY ON APPEARANCE POTENTIAL SPECTROSCOPY IN EVAPORABLE GETTERS

本文介绍运用俄歇电子出现电势谱和共振光电子与俄歇电子出现电势谱复合分析技术对蒸散型吸气剂的蒸散镜面所作的表面分析,其中主要是对不同质量吸气剂蒸散镜面的表面态作了一定比较,对吸气剂所含的杂质成分作了分析研究,并介绍了检测分析管的基本结构和检测电路方框图.这对出现电势谱在吸气剂生产上的开发应用,具有一定的实用价值.

Using AEAPS and EPAPS-AEAPS compound analysis technique, the analysis of surface component for the evaporable getter is introduced. The surface states of different qualities of evaporable getters are compared and impurities in getters are studied, introducing a principal construction and a detective graphic. It is very useful in applying the appearance potential spectroscopy to getter production.