摘要
利用溶胶-凝胶工艺在Y切铌酸锂单晶基片衬底上制备氧化镁薄膜,经镁离子内扩散后,进行了其表面改性研究。由X射线衍射和电子探针显微分析表明,扩散层具有一种新的化合物结构特性,镁离子浓度随扩散深度的变化具有近似半抛物线形状的分布。本实验结果可用于铌酸锂单晶光纤芯-包层波导结构,经选择适当的参数如膜厚、扩散温度、扩散时间等,可望得到晶纤的单模传输。
Magnesium oxide thin films on Y-cut lithium niobate single crystal substrate are prepared by sol-gel processing then,a Mg-ion indiffusion process is applied to study its surface characteristics.By means of X-ray diffraction and electron probe micro-analyses,it is shown that diffused layers have a characteristic crystallo-graphic structure of a new compound and the Mg-ion concentration has a nearly half parabolic profile with dif-fused depth.These results obtained in this study can be used to form the core-cladding waveguide structure of lithium niobate single crystal optical fiber and obtain single mode propagation by choosing suitable parameters such as film thickness,diffusion temperature,diffusion time,crystal fiber diameter,etc.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
1995年第1期68-72,共5页
Journal of The Chinese Ceramic Society
基金
西安交通大学精细功能电子材料与器件实验室开放基金
关键词
溶胶-凝胶
铌酸锂
改性
光学材料
氧化镁
薄膜
sol-gel,magnesium ion indiffusion,crystal fiber,waveguide structure