纳米计量学与纳米计量测试技术(一)

Nanometrology and Measurement Technology in Nanometer Scale

从纳米计量与测试的总体概念出发，参考Teague等人的文章，综合国内外在这个领域的研究情况，并引用我们的科研成果，对纳米计量学与纳米计量测试技术发展现状及前景进行了讨论，讨论的问题包括：如何实现纳米尺度计量；建立纳米参考坐标系；产生纳米精度重复运动；纳米精度传感器与纳米坐标参考系建立联系；各种纳米精度测量技术的不确定性限制等。

From the general concept of nanometrology and measurement technology and somereference article,this paper sgnthesises the researching situation of the field in and out our country anddiscusses the developing situation and prospect of nanometrology and measurement technology innanometer scale by introducing our researching results. The discusses problems are how to relizemeasurement technology in nanometer scale, to complete nanometer reference coordinate, to generatenanometer accuracy repetitive movement,the connection between the transducer and coordinate systemof nanometer,and the uncertain limitations for nanometer accuracy measurement technology.