微压压力传感器的结构改进

Evolution of Diaphragm Structure for low Range Pressure Transducers

硅压力传感器具有小型和高灵敏度的优点。近年来小型高灵敏度的压力传感器的量程已低到1kPa。在这一发展过程中硅弹性体结构的改进起了很大的作用。本文介绍了作者首先提出的适用于微压压力传感器的梁膜（岛）结构以及以后几年来出现的相近的结构。用这些结构都已制成全程为1kPa的压力传感器。

Silicon pressure transducers feature miniaturization and high sensitivity. The pressurerange for nimiature pressure transducers has been as low as 1 kPa by now. In the development of highsensitivity pressure transducer,the inprovement of diaphragm structure has been playing an importantrole. lntroduced in this paper is the beam-diaphragm (island)structure, first proposed by the authors in1989. Also introduced are two similar structures proposed by TUB and Honeywell in 1993 and 1992,respectively. 1 kPa pressure range has been achieved by all these three structure.