压电陶瓷微位移器的实验研究

EXPERIMENT RESEARCH ON THE PROPERTIES OF PIEZOELECTRIC CERAMIC MICROACTUATORS

介绍了压电陶瓷微位移器的动、静态特性及其测量方法和实际测量系统。实验研究了逆压电效应型和电致伸缩型两种压电材料所构成的微位移器的性能。逆压电效应型微位移器位移线性度为０．１１％，重复精度±０．０１μｍ，电压－位移灵敏度约为１μｍ／１００Ｖ。在２００Ｈｚ频段内，幅频特性平直，相频曲线呈线性，相位滞后量小于２５°；电致伸缩型微位移器的电压－位移呈非线性，所以位移量较大，对应电压５００Ｖ时，位移约为１２μｍ。微位移功能逆压电效应型适用于线性度要求较高的精密控制场合；

The dynamic and static properties of piezoelectric ceramic microactuators are introduced, and the measuring method and systems are also described. The properties of microactuators made from two different kinds of piezoelectric ceramic materials antipiezoelectric and electrostrictive effects are experimentally researched. The Linearity of antipiezoelectric kind is 0.11%, the repeatability is ±0.01μm, and the voltage-displacement sensitivity is about 1μm/100V. In low frequency band below 200Hz, the amplitude-frequency curve is straight, the phase-frequency curve is linear and the phase lag is less than 25 degrees. The voltage-displacement property of electrostrictive kind is nonlinear and the displacement is relatively large; When input voltage is 500V, the output displacement is about 12μm. The experiment results show that the first kind of microactuator can be used in precision linear controls, and the electrostrictive kind is more suitable for a larger displacement situation.