电子束处理前后C—SiC涂层的微观分析

Microanalysis of C-SiC coatings before and after electron beam treatment

在不锈钢材料表面，用射频磁控溅射沉积Ｃ—ＳｉＣ，利用ＸＲＤ、ＸＰＳ对电子束处理前后的Ｃ—ＳｉＣ涂层进行了微观分析．

The r.f.magnetyon spattering deposited C-SiC coatings on stainless steel surface are microanalysed by XRD and XPS before and after electron beam treatment,and the results are disscussed.