用符合弹性前冲法测量硅中的氧含量及其分布

Profiling of oxygen in silicon by coincident elastic recoil detection

采用２７ＭｅＶ的１２Ｃ５＋作为入射粒子，采用符合弹性前冲方法测量了５．６μｍ的硅样品中氧的含量及其深度分布．实验结果表明，采用１２Ｃ与１６Ｏ符合弹性前冲方法分析硅样品中的氧，其最小探测限可达２０×１０－６（原子比），深度分辨率为～４５０ｎｍ．该方法对于厚样品，尤其比常规弹性前冲优越。

A coincident elastic recoil detection method for oxygen Profiling in silicon isdescribed. By using 12C as the incident particles, 12C and 16O from the same collision event are detected respectively in coincidence. From the obtained 16O energy spectrum, oxygen profile in the sample can be calculated. 27MeV 12C5+ particles are used and oxygen profile in 5.6μm silicon is measured.The results show that this method has a detection limit of about 20×10-6 (atomic)and a depth resolution of about 450nm in 5.6μm silicon. It is specially useful for profiling light elements in samples of about several microns.