摘要
本实验设计了永磁非对称轴向二极场ＭＷＥＣＲ－ＣＶＤ系统，并对系统的等离子体特性进行了研究，获得了等离子体空间分布的图像以及气压对等离子体参数的影响。
A non-symmetrical axial two pole field MWECR-CVD system with permanent magnets is developed. The plasma characteristics in the system have been investigated experimentally. The spatial profiles of plasma parameters and the effect of pressure on plasma characteristics are presented.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
1995年第4期43-48,共6页
Nuclear Fusion and Plasma Physics
关键词
轴向二极场
ECD
等离子体
空间分布
CVD
Permanent magnet axial two pole field ECR plasma Spatial profile Pressure effect.
