微波半导体器件S参数的测量

Microwave Semiconductor Device S-parameter Measurement

本文介绍了用重新计算系统误差参数的方法来实现夹具误差修正的基本原理,详细介绍了应用HP85014A有源器件测量软件的主程序,通过研制加工测试夹具和编写相应的修正夹具误差的子程序,以实现测量多种不同外型尺寸的器件的方法。本文给出了编写修正夹具误差子程序的方框图及在设计和使用测试夹具中应考虑的几个问题。最后给出了用我们新设计的测试夹具和相应的夹具误差修正软件得到的测量结果与用HP85041A夹具和HP85014A软件得到的测量结果的对比。

The fundamental principle of correting the fixture error by recalculating the system error parameters is presented in this paper' The method for measuring various devices with diferent contour sizes by using the mainprogram of HP 85014A active device measurement software and by developing test fixture and writing the related subprogram of correcting fixture error are introduced in detail' The block diagram of the subprogram correcting fixture errors and several problems which should be considered in design and use of the test fix- tures are given, Finally, the comparison of the measurement results o- btained by the newly designed test fixture and related fixture error correction software and obtained by HP 85014A software is made.