摘要
综述了近年来几种新型红外光学材料──类金刚石、金刚石、碳化锗及磷化硼薄膜的发展现状,详细论述了这些光学材料的性能特点、制备方法、应用前景、存在的关键问题以及未来的发展方向。
Recent development of some IR antireflection and protective coatings such as diamond-like carbon, diamond, boron phosphide and germanium-carbon alloys, has been reviewed. Their characteristics, deposition methods, application prospects, main problems and development trends are discussed.
出处
《红外技术》
CSCD
1995年第5期23-28,共6页
Infrared Technology
关键词
类金刚石
金刚石
碳化锗
磷化硼
红外增透膜
Diamond-like carbon Diamond Germanium carbon Boron phosphide Antireflection and protective films