Pb_（1－x）Ca_xTiO_3铁电薄膜的制备

The Preparation of Ferroelectric Pb_(1-x)Ca_xTiO_3 Thin Film

合成了稳定性良好的用于溶胶－凝胶法制备Ｐｂ＿（１－ｘ）Ｃａ＿ｘＴｉＯ＿３（ｘ＝０．１～０．３）薄膜的涂液。研究了不同掺Ｃａ量对薄膜晶相结构和相变温度的影响。用旋涂法在（１００）ＭｇＯ单晶衬底材料上生长出均匀、无缺陷的钙铁矿结构（１００）择优取向的Ｐｂ（Ｃａ）ＴｉＯ＿３薄膜，取向率大于９５％。测定了在（１１１）Ｓｉ单晶衬底材料上得到的Ｐｂ（Ｃａ）ＴｉＯ＿３陶瓷薄膜的电学性质。

Pb_(1-x)Ca_xTiO_3(x=0.2～0. 3)coating solution with good stability synthesized by sol-gel method.The effect of different Ca content on the crystal structure and the change of crystal phases during heat treatment were studied.The homogeneous defectless and(100)oriented Pb_(1-x)Ca_xTiO_3 thin film with perovskite structure was grown on MgO single crystal substrate by spin-coating method.The orientation ratio is above 95%. The electric properties of the Pb_(0.8)Ca_(0.2)TiO_3 ceramic thin film on(111) Si single crytstal substrate were measured.